JPH0385465U - - Google Patents
Info
- Publication number
- JPH0385465U JPH0385465U JP14532589U JP14532589U JPH0385465U JP H0385465 U JPH0385465 U JP H0385465U JP 14532589 U JP14532589 U JP 14532589U JP 14532589 U JP14532589 U JP 14532589U JP H0385465 U JPH0385465 U JP H0385465U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- chamber
- sputtering device
- ion
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 238000001659 ion-beam spectroscopy Methods 0.000 claims description 3
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14532589U JPH0385465U (en]) | 1989-12-15 | 1989-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14532589U JPH0385465U (en]) | 1989-12-15 | 1989-12-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0385465U true JPH0385465U (en]) | 1991-08-29 |
Family
ID=31691967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14532589U Pending JPH0385465U (en]) | 1989-12-15 | 1989-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0385465U (en]) |
-
1989
- 1989-12-15 JP JP14532589U patent/JPH0385465U/ja active Pending
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